Dangerous Prototypes has a decapper for sale:
http://dev.dangerousprototypes.com/store/decap
[…] This isn’t a $5,000 super high resolution decapping, this is Dirty Decapping. Chip decapping is now available to the masses! The top of the chip is etched away, generally with nitric acid based nasties, to reveal the die and bonding wires. A series of medium resolution photos are taken through a microscope and stitched together. The resulting image is clear enough to verify a chip’s identity, and generally determine different areas on the die. You definitely won’t be able to identify individual gates or reverse engineer the chip, for that you need to find a $5,000+ high quality service. Be sure to check if this real example will suit your needs before ordering. […]
Firmware Security 